High Speed 3D Surface Profile Measurement System Using TDI Camera

Profile Measurement of Resist Surface Using Multi-Array-Probe System

Semiconductor processing in manufacturing must be fast and highly accurate in the measuring of the surface profile of soft thin films such as photoresist. Since photoresist surface is very smooth and deformable, a device to measure is required that will measure vertical direction with a nanometer resolution in height and not damage the film during the measurement. To do this, we developed an ap...

Direct High-speed Exhaust Gas Measurement System Using Semiconductor Laser

Facial Micro-Expressions Recognition using High Speed Camera and 3D-Gradients Descriptor

Facial micro-expressions were proven to be an important behaviour source for hostile intent and danger demeanour detection [1]. In this paper, we present a novel approach for facial micro-expressions recognition in video sequences. First, 200 frame per second (fps) high speed camera is used to capture the face. Second, the face is divided to specific regions, then the motion in each region is r...

Visual Measurement of Pile Penetration and Rebound Movement using a High-Speed Line-Scan Camera

When a construction company builds a high structure, many piles should be driven into the ground by a hammer whose weight is 7,000 Kg in order to make the ground under the structure safe and strong. So, it is essential to determine whether a pile is penetrated into the ground enough to support the weight of the structure since ground characteristics at different locations are different each oth...

Multi-Camera-based High Precision Measurement Approach for Surface Acquisition

In this paper, a unique 3D shape measurement method for measurement of nearly plain car body parts is proposed. The main advantage of the system is the high accuracy (about 0.1 mm), the high flexibility and the real-time processing. The primary application of the method is the 100% inspection of press formed car parts in the factory since in these cases the high accuracy and the real-time featu...